Abstract
Plasma generation by cathodic arc spots plays a crucial role for coating processes that make use of the Arc-PVD technology. Usually, the arc spot motion over the cathode is steered by a magnetic field of a particular distribution and magnitude to ensure a continuous plasma generation, the avoidance of liquid droplets, and a proper utilization of cathode material by homogeneous erosion. This study presents a semi-empirical model that allows for an examination and characterization of the arc spot motion with regard to direction and speed as a function of an imposed magnetic field. This model considers the different components of random walk, retrograde, and Robson drift motion. Introduced empirical coefficients were determined by corresponding experimental investigations. The calibrated model describes the arc spot motion in good agreement to the recorded spot tracks and can therefore be applied for an evaluation of different magnetic field configurations.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
