A semiconductor laser suitably fabricated by planar technology

Abstract

The semiconductor microlasers with an equilateral triangle resonator (ETR), which can be fabricated by dry etching technique from the laser wafer of the edge emitting laser, are analyzed by FDTD technique and rate equations. The results show that ETR microlaser is suitable to realize single mode operation. By connecting an output waveguide to one of the vertices of the ETR, we still can get the confined modes with high quality factors. The ETR microlasers are potential light sources for photonic integrated circuits.