Abstract

A scanning attachment has been designed for the Corinth electron microscope enabling either standard transmission images of thin specimens (TEM) or reflection scanning images of bulk specimens (SEM) to be obtained from the one instrument.At the heart of the modified instrument is a lens which acts as both the final projector lens for the TEM and also as the objective lens for the SEM with a working distance of 5mm. Thus even when used as a SEM the whole length of the Corinth column is traversed by the beam and this presents the choice of two possible modes of operation, namely, a two lens mode in which only the first condenser and final projector are excited, or a three lens mode in which the TEM objective lens is also excited. The three lens mode provides a range of much higher gaussian demagnifications.

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