Abstract
This article reports a mode-localized mass sensor based on thermal-actuation piezoresistive-detection self-oscillated weakly coupled resonators. Detailed theoretical models and simulations of the self-oscillation of the coupled resonators were established and were also verified using optical and electrical measurements. The sensor was fabricated and characterized in terms of stability, linearity, sensitivity, and resolution. Supplied with only a constant direct current (DC), the resonant mass sensor could oscillate at its resonant frequency with an ultrahigh quality factor of 95 k in air. By implementing the principle of the mode localization phenomenon, ~200 times parametric sensitivity improvement with amplitude ratio output was implemented compared to the traditional frequency output metric. A real-time mass detector with 84-fg resolution and larger than ~700-pg linear measurement range was obtained.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
