Abstract
A VCO-based temperature sensor with low supply sensitivity is presented. Fabricated in a 65nm CMOS process, the 0.004mm2 prototype operates with 1V supply and achieves a supply sensitivity of 0.034°C/mV and an inaccuracy of +0.9°C/−0.9°C and +2.3°C/−2.3°C from 0–100°C after 2-point calibration, with and without static non-linearity correction, respectively. For (programmable) resolutions of 1°C-to-0.3°C, the sensor draws 1nJ-to-3.4nJ per conversion, respectively.
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