Abstract
We present a self-contained theoretical description of azimuthally symmetric surface wave (SW) sustained discharges in argon at low pressure in a coaxial setup with a central cylinder. The model is based on a complete set of equations, including the homogeneous Boltzmann equation, Maxwell's equations, and the continuity and the momentum transfer equations for electrons and ions. The radially inhomogeneous plasma is described as a lossy dielectric medium with a complex permittivity. The above formulation provides a complete, self-contained description of the spatial distributions of the SW sustaining field and the plasma density, of the wave dispersion relation, and of the power transfer from the wave to the plasma. The theoretical results are compared to experimental data from absolute electric and magnetic field measurements and Langmuir probe and spectroscopic diagnostics, in an accompanying experimental paper.
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