Abstract

Flexible strain sensors have an irreplaceable role in critical and emerging fields, such as electronic skins, flexible robots, and prosthetics. Although numerous efforts have been made to improve sensor sensitivity to meet specific application scenarios, the signal-to-noise ratio (SNR) is an extremely critical and non-negligible indicator, which takes into account higher sensitivity, meaning that they can also detect the noise signals with high sensitivity. Coincidentally, scorpions with ultrasensitive vibration sensilla also face such a dilemma. Here, it is found that the scorpion ingeniously uses the viscoelastic material in front of its slit sensilla to realize efficient preprocessing of the signal. Its mechanism is that the loss factor of materials changes with frequency, affecting energy storage and transmission. Inspired by this ingenious strategy, a bioinspired strain sensor insensitive to a low strain rate was designed using a two-step template transfer method. As a result, its relative change in resistance reached 110% under the same strain (0.3197%) but with different strain rates (0.1 Hz and ∼20 Hz). The noncontact vibration experiments also show different responses to low-frequency vibration and high-frequency impact. Moreover, it can also be used as a typical flexible strain sensor. Under the tensile state, it has a gauge factor (GF) as high as 4596 upon 0.6% strain, and the response time is 140 ms. Therefore, it is expected that this strain sensor will be used in many important ultraprecision measurement fields, especially when the measured signal is small.

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