Abstract
Outstanding working characteristics make microelectromechanical systems (MEMS) switches attractive for many applications. However, the lack of reliability prevents their commercial success. Due to the small size, MEMS switches develop low contact force compared to their macroscopic counterparts, which leads to instability and fast increase of the contact resistance. This work describes the switch providing significantly larger force than the previously reported device. The enlargement is achieved by the modified shape of the beam and electrodes with the same footprint and lower actuation voltage. Design, simulation, fabrication and first experimental results for the switch are presented.
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