Abstract
The measurement of the wall shear stress in fluid mechanics has important implications for the investigation of turbulent flow phenomena. An advanced version of the MEMS silicon surface fence sensor that measures this stress is presented herein. This sensor consists of a cantilever structure with a length of 5 mm, a height of 315 μm, and a thickness of 10 μm. Fluid flowing towards this structure causes it to bend. The resulting bending stress in the cantilever is measured with four piezoresistors, and this stress is correlated to the wall shear stress. The offset voltage has been reduced significantly. The sensor operates over a range of approximately −1 to +1 N/m 2 with a resolution of 10 mN/m 2.
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