Abstract
A Fresnel zone plate based SPEM (scanning photoelectron microscope) is in operation at the Pohang Light Source. Space resolution of the SPEM is typically ≤ 1 μm(0.4 μm in the best resolution) and the photon flux at the focused spot is ∼10 9 photons/ s. The SPEM is working in the energy range between 400 and 1,000 eV. In taking images and spectra, the SPEM detects photoelectrons from the focused spot using a hemispherical analyzer with 16-channel detection capability at energy resolution of ∼ o.5 eV. The SPEM also measures sample current, with which comparative x-ray absorption micro-spectroscopy is available in limited energy range with spectral resolving power (E/ΔE) of 3,000. The advantage of detecting sample current image and x-ray absorption spectrum at the Fe L III -edge is demonstrated for understanding the effect of electrochemically deposited Zn layer on Fe substrate.
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