Abstract
Hitachi, Limited has recently completed the development of a commercial scanning electron microscope, the features of which are discussed herein. Fig. 1 is an external view of the instrument.Lens SystemA three-stage reduction lens system is employed to obtain a short electron beam path. This minimizes the effects of any external electromagnetic or stray electrical fields as well as mechanical vibration or shock. Axial alignment is easily accomplished by transverse adjustment of the electron gun and lens system. Aperture plates with different hole sizes are provided in the condenser lens, deflection coil, and on the principal plane of the objective lens. The apertures are easily removed for cleaning. The electromagnetic stigmator is located outside the objective lens to facilitate removal for cleaning. Resolution of 200Å~250Å is guaranteed.
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