Abstract

Reliable real-time surface inspection of extended objects is needed in several industrial applications. At the one hand this inspection should be performed with the highest possible resolution to achieve the recognition of fault indicating structures with lateral dimensions down to the range of a few microns. On the other hand the object should be measured during an industrial production process “on the fly” and - if possible - at once. In the case of a car body this would mean that the inspection system had to perform a robust measurement with a ratio of > 10-6 between depth resolution and lateral extension. This ratio is at least one order beyond the ones which existing technologies offer.

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