Abstract

A new highly linear temperature sensor with a large resolution using a LiNbO 3 SAW delay-line oscillator is presented. The large temperature dependence of the propagation velocity of a surface acoustic wave in a yz LiNbO 3 crystal (⋍ −90 ppm/°C) is used in an electroacoustic delay line in the feedback path of an oscillator. The oscillation frequency is inversely proportional to the signal delay. Measurements of this sensor show very linear frequency-versus-temperature characteristics.

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