A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling

B Arda Gozen,O Burak Ozdoganlar

doi:10.1007/s11671-010-9653-7

B Arda Gozen, O Burak Ozdoganlar

Open Access

https://doi.org/10.1007/s11671-010-9653-7

Copy DOI

Journal: Nanoscale Research Letters	Publication Date: Jun 25, 2010
Citations: 63	License type: cc-by

Affiliation: Carnegie Mellon University

Abstract

We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.

Highlights

Tip-based creation of nano-scale features by mechanical removal has been considered since the 1990s
We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling
An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool

Summary

Introduction

Tip-based creation of nano-scale features by mechanical removal has been considered since the 1990s. Geometric capability, and wide-range material applicability of mechanical removal processes, surface characterization instruments such as scanning tunneling microscopes (STMs) [1], atomic force microscopes (AFMs) [1], and nano-indenters [2] have been applied to create nano-scale features on various materials. The basic capability of AFM-based surface modification has been established, its wide-range of applicability as a viable nanomanufacturing technique has been hindered by several issues. The material removal mechanism is dominated by ploughing (i.e., plastic deformation) rather than shearing (i.e., removal of material in the form of a chip) This causes accumulation, rather than removal, of the material around the created features (i.e., ridge formation) [4, 6, 11].

Methods

Results

Conclusion