Abstract
This paper reports a novel design for electrostatic microgrippers. The new structure utilizes rotary comb actuators to solve the pull-in problem of microgrippers during large displacement manipulation and therefore avoids the widely used conversion systems which necessitate a high driving voltage. The gripper is fabricated using a SOI process with a 60 μm structural layer. Test results show the gripper obtained a displacement of 94 μm with an applied voltage of 100 V. An animal hair is gripped to demonstrate the applicability of the gripper for micro object manipulations.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
