Abstract

Using RF magnetron sputtering and electronic beam lithography, a NbN microbolometer integrated with a planar logarithm periodic antenna is fabricated on a SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si (100) substrate for detecting signals from 0.05 THz to 0.4 THz. The best attainable responsivity of the device is about 100 volts per watt at 300 K.

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