A robust resonant controller design for MEMS-based multi-layered prestressed piezoelectric cantilever beam

Abstract

This paper presents the design and implementation of a robust resonant controller to damp the first resonant mode of a MEMS-based multi-layered prestressed piezoelectric (PZT) cantilever beam. The cantilever dynamics for control design are identified from experimentally measured data. The controller design is based on a mixed negative-imaginary, passivity, and a small-gain approach. Experimental results demonstrate that the designed resonant controller is able to effectively damp the first resonant mode of the cantilever, significantly reducing settling time from 528 ms to 32 ms. The controller is robust to changes in the cantilever dynamics due to the variation in residual stress in the PZT thin film or variation in driving voltage. This control design approach is useful for MEMS devices that are susceptible to residual stress variation or stress variation due to driving voltage.