Abstract

Abstract Electrochemical micromachining (micro-ECM) is an unconventional micromachining technology that has capability to fabricate high aspect ratio micro-holes, micro-cavities, micro-channels and grooves on conductive and difficult-to-cut materials. Both academia and industry have the consensus that it offers promising machining performance especially in terms of high surface finish, no tool wear and absence of thermally induced defects. Furthermore in order to machine novel materials with extreme properties, novel hybrid electrochemical micromachining technologies are under development. With these hybrid micro-ECM technologies, capabilities of micro-ECM can be expanded by combining it with other processes. To fully exploit the potential as well as improve micro-ECM technology and related hybrid processes, a wide spectrum of multidisciplinary knowledge is needed. The present review systematically discusses process capabilities and research developments of electrochemical micromachining and its hybrid variants considering knowledge of both basic and applied research fields. After few introductory review articles in prior state of the art, this review fills an important gap in research literature by presenting first time an extended literature source with a wide coverage of recent research developments in electrochemical micromachining technology and its hybrid variants. This paper outlines the research and engineering developments in electrochemical micromachining technology and its hybrid variants, review of the related concepts, aspects of tooling, advanced process capabilities and process energy sources. It also provides new sights into technological understanding of micro-ECM technology which will be helpful in future engineering developments of this technology.

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