A review on MEMS based micro displacement amplification mechanisms

Abstract

This paper provides a comprehensive review on the design and development of micro displacement amplification mechanisms. Micro displacement amplification mechanisms are gaining importance in MEMS applications where motion precision, reliability, accuracy, and compactness are needed. These displacement amplification mechanisms improve the sensitivity of micro-sensors and voltage stroke ratio of micro actuators. There advantages have opened doors for new and improved micro devices with unprecedented performance. In this paper, we have reviewed compliant displacement amplification mechanisms including bridge type mechanism, positioning stage amplification mechanism, Scott–Russell mechanism, mechanisms with micro-lever micromechanical levers concept, multi-stage force displacement amplification mechanism, hydraulic displacement amplification mechanism and thermally actuated displacement amplification mechanism. Different displacement amplification mechanisms incorporated with micro grippers, micro actuators especially piezoelectric are reviewed in detail.