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Abstract
The pseudo-MOS transistor (/spl Psi/-MOSFET) is a surprising and useful technique for the rapid evaluation of SOI wafers, prior to any CMOS processing. We review the static and dynamic modes of operation as well as the main models and methods for electrical parameter extraction. Selected numerical simulations are presented in order to clarify the optimal conditions of operation. Finally, practical applications are exemplified which illustrate the efficiency of the /spl Psi/-MOSFET technique for in situ characterization of SOI technologies and processes.
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