Abstract

The Boltzmann transport equation is commonly considered to be the best semi-classical description of carrier transport in semiconductors, providing precise information about the distribution of carriers with respect to time (one dimension), location (three dimensions), and momentum (three dimensions). However, numerical solutions for the seven-dimensional carrier distribution functions are very demanding. The most common solution approach is the stochastic Monte Carlo method, because the gigabytes of memory requirements of deterministic direct solution approaches has not been available until recently. As a remedy, the higher accuracy provided by solutions of the Boltzmann transport equation is often exchanged for lower computational expense by using simpler models based on macroscopic quantities such as carrier density and mean carrier velocity. Recent developments for the deterministic spherical harmonics expansion method have reduced the computational cost for solving the Boltzmann transport equation, enabling the computation of carrier distribution functions even for spatially three-dimensional device simulations within minutes to hours. We summarize recent progress for the spherical harmonics expansion method and show that small currents, reasonable execution times, and rare events such as low-frequency noise, which are all hard or even impossible to simulate with the established Monte Carlo method, can be handled in a straight-forward manner. The applicability of the method for important practical applications is demonstrated for noise simulation, small-signal analysis, hot-carrier degradation, and avalanche breakdown.

Highlights

  • Moment-based approaches for semiconductor device simulations are, despite their deficiencies for scaled-down devices, still the most popular methods for technology computeraided design (TCAD)

  • Higher accuracy than that provided by moment-based methods can in principle be obtained by solving the full Boltzmann transport equation (BTE) for the carrier probability distribution function f (x, p, t), where x denotes the spatial coordinate, p momentum, and t time

  • The first term describes carriers in thermal equilibrium entering the device (Tv needs to point into the device), while the second term describes the annihilation of heated carriers leaving the device

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Summary

Introduction

Moment-based approaches for semiconductor device simulations are, despite their deficiencies for scaled-down devices, still the most popular methods for technology computeraided design (TCAD). Higher accuracy than that provided by moment-based methods can in principle be obtained by solving the full Boltzmann transport equation (BTE) for the carrier probability distribution function f (x, p, t), where x denotes the spatial coordinate, p momentum, and t time. The first is due to the inversely proportional relationship of the accuracy with the square root of the number of particles and processor cycles [3]: If the distribution function needs to be resolved over several orders of magnitude, excessive execution times are required [4]. To overcome the limited accuracy of moment-based methods on the one hand, but to avoid excessive execution times of the Monte Carlo method on the other hand, sophisticated deterministic methods for solving the BTE were developed. We draw a conclusion and discuss possible future research directions worthwhile to pursue

The SHE method
Spherical harmonics expansion
A SHE of an arbitrary function u in energy space reads
Boundary conditions
Stabilization and H-transform
Modeling
Band structure
Pauli principle
Carrier-carrier scattering
Generation and recombination
Quantum mechanical corrections
Numerics
Discretization
The role of spherical symmetry
Self-consistency
Adaptive variable-order scheme
Parallelization
Selected applications
Small-signal analysis
Hot carrier degradation
Avalanche breakdown
Outlook
More materials
Large-scale simulations
SHE for the transient BTE
Findings
Summary

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