Abstract
For decades, industrial companies have been collecting and storing high amounts of data with the aim of better controlling and managing their processes. However, this vast amount of information and hidden knowledge implicit in all of this data could be utilized more efficiently. With the help of data mining techniques unknown relationships can be systematically discovered. The production of semiconductors is a highly complex process, which entails several subprocesses that employ a diverse array of equipment. The size of the semiconductors signifies a high number of units can be produced, which require huge amounts of data in order to be able to control and improve the semiconductor manufacturing process. Therefore, in this paper a structured review is made through a sample of 137 papers of the published articles in the scientific community regarding data mining applications in semiconductor manufacturing. A detailed bibliometric analysis is also made. All data mining applications are classified in function of the application area. The results are then analyzed and conclusions are drawn.
Highlights
The last few decades have seen the birth of a great diversity of products and services associated with electrical and electronic equipment, and witnessed the presence of electronic and electrical equipment in a large number of products and services, which are subject to constant change [1]
We considered papers that address the application of data mining to exploit data stored during semiconductor manufacturing processes
The production of semiconductors is a highly complex process, which entails several subprocesses that employ a diverse array of equipment
Summary
The last few decades have seen the birth of a great diversity of products and services associated with electrical and electronic equipment, and witnessed the presence of electronic and electrical equipment in a large number of products and services, which are subject to constant change [1]. Semiconductor production is the process that creates integrated circuits, such as transistors, LEDs, or diodes that can be found in electrical devices and consumer electronics. During the front-end process, the crystalline silicon ingot is produced and the wafers are cut, the electrical circuits are created by photolithography and other chemical processes and, they are electronically tested. The semiconductor manufacturing industrial units (known as fabs) are one of the highest capital-intensive and entirely automated production systems, in which agnate processes and equipment are utilized to manufacture integrated circuits through a wide range of extensive and complex processes with firmly controlled manufacturing processes, reentering process flows, advanced and complex equipment, and demanding deadlines for complying with constantly unpredictable demands of a constantly increasing product mix [5]
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