Abstract

In this paper, for the first time, the mass sensitivity of a 3-DoF mode localized electrostatic coupled resonator was characterized under atmospheric pressure. A reversible method was used in which nanoparticles are added on and removed from one resonator of the 3-DOF coupled resonator system. Besides, a comparison of three mass sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results show that a 3-DOF mode localized coupled resonator has potential to be employed for biosensing applications.

Highlights

  • Micro-electro-mechanical-system resonators are rapidly developing and are used for many sensing applications

  • Montaseri [7] performed similar experiments under atmospheric pressure. It was demonstrated with the same stiffness perturbation that the change of the resonator amplitude ratio was significantly higher than that of the resonant frequency shift, indicating the resonator amplitude ratio is an output metric with higher sensitivity with respect to perturbations

  • The corresponding resonance frequency shift, amplitude change and the change of resonance amplitude ratio versus normalized mass perturbation are presented in Figure 5, where m is the mass value of resonator[1] and δm is the mass perturbation on resonator[1]

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Summary

Introduction

Micro-electro-mechanical-system resonators are rapidly developing and are used for many sensing applications. A sensing methodology has been put forward based on mode localization It uses the ratio of the resonant amplitudes of the resonators as an output metric. Demonstrated a 3-DOF weakly coupled resonator sensor utilizing mode localization to achieve approximately three orders of magnitude enhancement in stiffness change sensitivity compared to a similar sized conventional 1-DOF MEMS resonator when operated in vacuum. Montaseri [7] performed similar experiments under atmospheric pressure It was demonstrated with the same stiffness perturbation that the change of the resonator amplitude ratio was significantly higher than that of the resonant frequency shift, indicating the resonator amplitude ratio is an output metric with higher sensitivity with respect to perturbations.

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Conclusions

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