Abstract
This study proposes a microfabricated resonant pressure sensor in which a pair of double-ended tuning forks were utilized as resonators where comb electrodes and single-crystal silicon-based piezoresistors were used for electrostatic excitation and piezoresistive detection, respectively. In operations, pressures under measurements deform the pressure-sensitive diaphragm to cause stress variations of two resonators distributed on the central and side positions of the pressure-sensitive diaphragm, where the corresponding changes of the intrinsic resonant frequencies are then captured piezoresistively. The developed resonant pressure sensors were fabricated based on MEMS with open-loop and closed-loop characterizations conducted. Key sensing parameters including quality factors, differential pressure/temperature sensitivities and fitting errors were quantified as higher than 17,000, 48.24 Hz/kPa, 0.15 Hz/°C and better than 0.01% F.S. (140 kpa), respectively. In comparison to previously reported resonant pressure sensors driven by parallel-plate electrodes, the developed sensor in this study is featured with a lower temperature sensitivity and a higher stability.
Highlights
Resonant pressure sensors utilizing mechanical resonators as stress gauges are commonly used in the areas of meteorology and aviation [1] because of significant advantages including large resolutions, high compatibilities with digital instruments, and long-duration stabilities [2]
It was observed that the maximal errors and the accuracy of the resonant pressure sensor developed in this study were within ±13 Pa, and better than 0.01% F.S. (140 kPa), respectively
A new resonant pressure sensor based on electrostatic excitation and piezoresistive detection was presented in this study
Summary
Resonant pressure sensors utilizing mechanical resonators as stress gauges are commonly used in the areas of meteorology and aviation [1] because of significant advantages including large resolutions, high compatibilities with digital instruments, and long-duration stabilities [2]. In comparison to other modes of excitation and detection, this mechanism is characterized by low energy consumption (i.e., less currents in electrostatic excitation), small device volume (i.e., no requirement of magnets), low detection impedance and low noise levels (i.e., low impedance values of piezoresistors). Leveraging these advantages of electrostatic excitation and piezoresistive detection, previously, we developed a double-ended tuning fork based resonant pressure sensor [13] featured with an MicromLaecvhienreas g20i1n9g, 1t0h, e46s0e advantages of electrostatic excitation and piezoresistive detection, previou2solfy, we developed a double-ended tuning fork based resonant pressure sensor [13] featured with an accuracy better than 0.01% F.S. Twhaes feoxlcloitwedinbgysceocmtiobn-ds rdiveesccraibpeactihteordeelseicgtnroadneds raantahleyrstihs,afnabpraircaaltlieoln-p, lraetseucltaspaancidtodridscruivsesieolnecftoror dthees. nTehwe lfyolplorowpionsgedsercetisoonnsandtepscrreisbseurtheesednessoigr.n and analysis, fabrication, results and discussion for the newly proposed resonant pressure sensor
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