Abstract
In order to improve the output capacity of a piezoelectric pump when transferring gas, this paper presents a compact resonant piezoelectric diaphragm pump (hereinafter referred to as the piezoelectric diaphragm pump), which is driven by a rectangular piezoelectric vibrator. The compact structure can effectively release the vibrating constraints of the vibrator, and enlarge its center output displacement, so as to increase the volume change rate of the pump chamber. Based on the structure and the working principle of this piezoelectric diaphragm pump, a dynamic model for the diaphragm system is established in this paper, and an analysis on factors affecting the resonant frequency of the system is then conducted. We tested on the prototype under the driving voltage of 260 Vpp. The results show that the diaphragm system reaches resonance under the driving frequency of 265 Hz, which is very close to the fundamental frequency of check valve. Compared with the rectangular piezoelectric vibrator’s amplitude, the diaphragm’s amplitude is double amplified. At this time, the piezoelectric diaphragm pump achieves the maximum gas flow rate as 186.8 mL/min and the maximum output pressure as 56.7 kPa.
Highlights
Decades of development has given the piezoelectric diaphragm pump an extensive application and a favorable prospect
In 2007, the Lyndon Johnson Space Center in Texas successfully developed a resonant piezoelectric diaphragm pump, of which the diaphragm movement in the pump chamber was driven by a piezoelectric stack [9]
As the piezoelectric stack have complex manufacturing process and high cost, this resonant piezoelectric diaphragm pump was failed in large-scale applications
Summary
Decades of development has given the piezoelectric diaphragm pump an extensive application and a favorable prospect The media it can transfer include micro-compressible liquid with low viscosity, high viscosity liquid, particle flow, and compressible gas [1,2,3]. The diaphragm of a piezoelectric diaphragm pump is the piezoelectric vibrator itself It has a low transfer capacity when conveying compressible gas, constrained by the small deformation of this kind of vibrator [4]. As the piezoelectric stack have complex manufacturing process and high cost, this resonant piezoelectric diaphragm pump was failed in large-scale applications. Um pumping pressure is 23 kPa. TThhee nnuummbbeerr ooff tthhee ssttuuddiieess oonn ggaass ppiieezzooeelleeccttrriicc ddiiaapphhrraaggmm ppuummpp iiss nnoott llaarrggee. Wdee. dWeseigdneesdigannedd panroddpurcoedduacepdraotportoytpoetyopferoefsorensaonntapnitepzioeezloecetlreicctrdiciadpihaprahgrmagmgagsapsupmump,pa,nadndwweeththeenntteesstteedd aanndd aannaallyyzzeedd iittssggasasouotuptuptupteprfeorrfmoramncaen.cBe.y Badyjuasdtijungstitnhge pthareampaertearms eotfetrhseodfiatphheradgiamphvribagramtiovnibsyrasttieomn, sthyestpemer,fothrme panercfeoormf tahnecpeuomf tphehapsubmepenhoaps tbimeeinzeodpttiomthizeemd taoxitmheumma. ximum
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