Abstract

We have developed a high-efficiency MEMS vibrational energy harvester with a resonance-maintaining circuit. Of particular note, the circuit is capable of both (1) rectifying the output to compensate for the electret bias voltage in the harvester and (2) avoiding electromechanical feedback by maintaining a relatively stable apparent load and resonance state. These improvements to the control circuitry allow the energy harvester to achieve useable energy outputs of over 500µW with highly efficient energy conversion ratios (79%).

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