A reliable compact ultra-high vacuum scanning tunneling microscope

Abstract

A new ultrahigh vacuum (uhv) scanning tunneling microscope (STM) with exchangeable samples and tips is constructed which is compatible with typical surface science techniques. The STM incorporates a number of novel features, including an optimized inner vibration isolation system. A tip-to-sample approach is performed by means of a simple, reliable all-mechanical system with only two parts moving in vacuum. The tip is scanned using a monolithic piezoelectric element. A compact design allowed to place the entire STM assembly on a single 150 mm outer diameter uhv flange. The STM has been placed on a side flange of the uhv chamber equipped with electron spectroscopy technique and sample/tip cleaning and preparation facilities. The performance of the STM is illustrated with images of Si(111) surface.