Abstract
A biosensor with mirror microcantilevers, based on silicon-on-insulator (SOI) was designed and fabricated for biochemical detection. For measuring the extremely low deflections of the microcantilevers, a high precision optical readout approach based on a fiber optical reflective light intensity readout approach were presented. The results demonstrate that microcantilever biosensor has very high sensitivity of 6.26908mV/nm, and the measurement resolution is up to 0.1998nm. In the practical measure glucose solution concentration experiments, the results demonstrate that the sensitivity is up to 1.19mV/μg/ml.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Optik - International Journal for Light and Electron Optics
Paper Title
Journal
Date
