Abstract
An 8 stage reconfigurable charge pump is presented for MEMS electrostatic actuation. The circuit attains a simulated output voltage of 10.62 V from a 1.2 V supply with digitally programmable voltage levels. Reduced power consumption is achieved using a variable frequency clock. The charge pump exhibits a short rise time of 1.56 μs with a 50 MHz clock and 1 pF load. The circuit is designed in 0.13 μm CMOS technology and has a compact area of 215 μm × 300 μm.
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