Abstract

With the advancement of manufacturing technology in transfer printing and two-dimensional materials fabrication, roll-to-roll (R2R) dry transfer by mechanical peeling is becoming a promising process for efficient transfer of thin film materials from a donor substrate to a target substrate for device fabrication. As a key process variable, the peeling angle determines the loading condition of the R2R dry transfer process and thus the quality of the transferred material. Controlling the peeling angle is challenging in a R2R process because of the adhesion energy and peeling front velocity in addition to the flexible substrates involved in the peeling process. In this article, a real-time supervisory control strategy is developed for the R2R mechanical peeling process. A strain energy-based peeling process model is employed to estimate the peeling front velocity and the adhesion energy. The real-time estimation is then used to generate reference signals for web tension controllers to track the desired peeling angles. The proposed control strategy is demonstrated with both simulation and experimental results.

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