Abstract
In this study, we propose an effective real-time scheduling method based on the timetabling technique for the cluster tool. Instead of considering the no-wait assumption generally adopted in almost all of the previous literature, we take wafer transfer delay into consideration, which implies that a wafer can stay at the current chamber for a certain, limited time before proceeding to the next chamber. In order to improve the total cycle time, an additional pulling procedure to the timetabling is introduced and applied. Numerical examples show that the proposed method gives effective schedules in real time even for practical-sized problems.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
