Abstract
This letter presents a high performance rate-integrating honeycomb disk resonator gyroscope (HDRG). High Q factor resonator and symmetric vibration detection gain are the key to high performance rate-integrating gyroscope. By stiffness-mass decoupling design, HDRG can achieve high Q factor of about 600k and decay time of over 44s. A compensation method is applied to suppress the rate-dependent angular drift caused by the asymmetry circular distribution of detection gains. Finally, the rate-integrating HDRG shows an excellent bias instability of 0.038°/h, 1.05ppm scale factor nonlinearity, wide measurement range of over ±7000°/s and a threshold value of about ±0.0001°/s, which is the best performance in the reported rate-integrating MEMS gyroscopes.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.