Abstract
The production of nickel and platinum nanoparticles on silica nanowire substrates using plasma-enhanced chemical vapor deposition has been investigated. Determination of particle size and particle size distribution was done using transmission electron microscopy (TEM). Ni nanoparticle diameters were found to be between 2 and 6 nm, with particle size increasing as the substrate temperature increased from 573 to 873 K. The size of Ni nanoparticles was found to be dependent on the chamber pressure during growth. The results indicate a competition between pressure-related diffusion within the vapor and dissociation of the precursor. Pt nanoparticle diameters were consistently found to be 2.5–3.0 nm at all deposition conditions. Insufficient thermal energy within the studied range results in a minimal contribution from surface diffusion, the primary mechanism for nanoparticle growth.
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