Abstract
A laser-chemical process combines advantages of both laser ablation and electro-chemical machining and is used to produce free form micro forming tools. The desired geometry results from a sequence of overlapping removal paths with different cross section. Due to the high requirements of geometry accuracy and surface roughness, a three-level quality control system is developed for this process. Based on causal analysis between removal profile and process parameters a post-process controller designs the position and cross section for the removal paths. With an in situ quality control loop the deviation from the desired removal profile along the feed direction could be compensated by using a state observer and an interferometer. At an in-process level the required process parameters are real time observed and controlled.
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