A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

Tao Chen,Jinyong Liu,Zhan Yang,Lining Sun,Yaqiong Wang,Huicong Liu

doi:10.3390/mi8020033

Abstract

This paper presents a triple-finger gripper driven by a piezoceramic (PZT) transducer for multi-target micromanipulation. The gripper consists of three fingers assembled on adjustable pedestals with flexible hinges for a large adjustable range. Each finger has a PZT actuator, an amplifying structure, and a changeable end effector. The moving trajectories of single and double fingers were calculated and finite element analyses were performed to verify the reliability of the structures. In the gripping experiment, various end effectors of the fingers such as tungsten probes and fibers were tested, and different micro-objects such as glass hollow spheres and iron spheres with diameters ranging from 10 to 800 μm were picked and released. The output resolution is 145 nm/V, and the driven displacement range of the gripper is 43.4 μm. The PZT actuated triple-finger gripper has superior adaptability, high efficiency, and a low cost.

Highlights

Applications of micro-manipulation can be extensively found in microsystem manufacture, micro-medical, biomedical, optical engineering, and other important areas [1]
The electrostatic actuation mechanism based on micro-electromechanical systems (MEMS) can realize high precision with a small device size and generate a satisfactory amount of output force [3,4]
This paper reports the design of a separate-structured triple-finger gripper with a piezoelectric actuation mechanism for multi-target micromanipulation

Summary

Introduction

Applications of micro-manipulation can be extensively found in microsystem manufacture, micro-medical, biomedical, optical engineering, and other important areas [1]. Various micro-grippers have been designed and developed based on different actuation techniques. The electrostatic actuation mechanism based on micro-electromechanical systems (MEMS) can realize high precision with a small device size and generate a satisfactory amount of output force [3,4]. Xu et al developed a micro-gripper with integrated electrostatic actuator and capacitive force sensor. Boudaoud et al fabricated an electrostatic micro-gripper with a nonlinear actuation mechanism while handling calibrated micro glass balls 80 μm of diameter [6]. Brandon et al made a MEMS gripper which can pick and place gold nano spheres. The gripper was able to withstand gripping forces more than 700 μN and 38 μm out-of-plane bending deflections, proving the gripping tips to be mechanically strong for micro/nano manipulation [7].

Methods

Discussion

Conclusion