Abstract
A micromachined flow sensor for an integrated microfluidic system, operated in a pulse-modality, has been designed, fabricated and characterized. As a part of the complex of components constituting a generic fully integrated microfluidic system for autonomous biochemical analysis, this micro flow sensor has several unique operational and physical characteristics. A novel pulsing scheme compensates against any occurring temperature drift, resulting in high repeatability. Companion elements include microvalves, micropumps, microreservoirs, microchannels, etc., whose liquid (or gaseous) fluid dynamics must be characterized by the flow sensor described.
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