Abstract
A new type of magnetically levitated superconducting conveyer for wafer transportation is proposed. At present, wafer fabrication process is carried out in clean rooms. Magnetically levitated conveyer without any mechanical contacts is most useful in such clean rooms. Our system is designed to levitate wafers on a levitated stage with permanent magnets. Vibrations are suppressed by using PD (proportional and differential) control. This paper discusses a prototype magnetically levitated superconducting conveyer, its simulation results and its experimental results.
Published Version
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