A Proposition on Material Properties Estimation of Piezoelectric Thin Films Utilizing Dual-Points Concurrent Displacement Measurement

Abstract

A material properties estimation method was proposed for piezoelectric thin films fabricated on substrates. The proposed method can present piezoelectric strain constant d333 on basis of displacement difference between top and bottom points of specimen under external electric field with a disc-type electrode. In this paper, its availability was verified with finite element method. Thicknesses of piezoelectric thin film and substrate were changed and the mechanical and electrical behavior was computationally analyzed to get dual-points concurrent displacement. Then piezoelectric strain constant was estimated from the simultaneous equation in consideration of piezoelectric and Poisson's effects. As a result, the errors of the estimated values under static and dynamic electric fields were 1.1 % and 4.1%, respectively.