A programmable macroscale electrical field self-assembly array device for diverse thin film applications

Abstract

For a programmable mask-less patterning, we develop the novel electrophoretic deposition (EPD) method by a macroscale programmable patterning system, which has a large matrix EPD array device (2.5×2.5mm2 electrodes with 10μm gap; 20 by 20 electrodes pattern) and printed circuit board controllers. We demonstrate programmed diverse micro/nano size (20nm–10μm) polystyrene beads pattern onto our 400 sites wafer scale chip, which carry out that individually penetrate electrical fields at each electrode. To pattern diverse materials onto non-conductive other substrate, 200nm nano-porous nitrocellulose membrane is laid onto the system. Cy3 17 bases DNA and 40nm biotin-coated beads with fluorophore are patterned onto nitrocellulose substrate. Furthermore, we demonstrate that 7–15nm diameters and 0.5–10μm lengths carbon nanotubes (CNT) are patterned onto the nitrocellulose substrate by the system. The CNT pattern films are simply lift off from the system. Also, CNT, poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) and (6,6)-phenyl-C61-butyric acide methyl ester and poly(3-hexylthiophene) are locally patterned, through the multi-layering process by the system. The multi-layered polymer device is assembled with indium tin oxide onto polyethylene terephthalate as photodetector. The polymer photodetector is demonstrated by light on (2.5×10−5 A at 3V)/off condition. (3.5×10−5 A at 3V). Finally, we demonstrate the fabrication of energy storage device, which is patterned LiCoO2 (LCO)/CNT mixtures/CNT and graphite/CNT as a cathode and anode of secondary battery. The half-cell of 143.7μm deposited LCO mixtures is successfully operated with 112mA/g capacity for 3 times charging/discharging cycles.