Abstract

Many challenges accompany the use of three-dimensional (3D) integrated circuits (ICs). Some of these challenges are design-related, while others are verification-related. In this paper, we focus on verification issues; more precisely, on advanced layout physical verification tasks, such as advanced latch-up design rule checks and candidate hot junction detection. We explain the differences and additional challenges as compared to conventional two-dimensional (2D) IC verification. We introduce a programmable checker to automate these verification challenges for complete 3D IC designs. The checker differentiates between external and internal inputs/outputs from the assembly level without using layout markers on the die level. It checks external latch-up design rules using a topology-aware analysis, and checks mixed voltage latch-up design rules using a voltage-aware analysis. It also detects candidate hot junctions, because their existence can cause damage if voltage rises too high and current is not sufficiently limited. A design is used to illustrate the different type of checks, and demonstrate how to set up required input constraints, share captured results/violations, and effectively debug results to overcome potential design weaknesses.

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