Abstract
Quantitative prediction of the smoothing of mid-spatial frequency errors (MSFE) is urgently needed to realize process guidance for computer controlled optical surfacing (CCOS) rather than a qualitative analysis of the processing results. Consequently, a predictable time-dependent model combining process parameters and an error decreasing factor (EDF) were presented in this paper. The basic smoothing theory, solution method and modification of this model were expounded separately and verified by experiments. The experimental results show that the theoretical predicted curve agrees well with the actual smoothing effect. The smoothing evolution model provides certain theoretical support and guidance for the quantitative prediction and parameter selection of the smoothing of MSFE.
Highlights
In the past few decades, computer controlled optical surfacing (CCOS) has been widely and successfully applied to the manufacture of optical components [1,2,3], providing a deterministic material removal technology for optical devices [4], such as small-sized optical lenses, large astronomical telescopes and high-power laser systems
Smoothing contrast experiment of ripple errors with different spatial periods In order to explore the relationship between the error decreasing factor (EDF) and the spatial frequency of ripple errors, a set of smoothing contrast experiments were carried out on three pieces of fused silica with initial surface error of 3 mm, 5 mm and 7 mm obtained through magnetorheological finishing pretreatment, respectively
The experiment was performed on a pitch pad with a diameter of 35 mm, with eccentricity set to 3 mm, angular velocity of revolution set to 200 rpm, of rotation to 20 rpm, and the rotation direction being opposite to the revolution direction
Summary
In the past few decades, computer controlled optical surfacing (CCOS) has been widely and successfully applied to the manufacture of optical components [1,2,3], providing a deterministic material removal technology for optical devices [4], such as small-sized optical lenses, large astronomical telescopes and high-power laser systems. Different processing methods are commonly used, which has a broad coverage including CNC polishing, gasbag polishing, magnetorheological polishing, ion beam polishing, etc [5,6,7] In some extreme optical systems like large-aperture telescope systems or nanoscale lithography systems, surface errors of the optical components play a critical role in the imaging and operation quality of the entire system. Lots of research have been done on the smoothing of the surface errors. Mehta and Reid first proposed flexible pads in 1990 and built bridge models based on elastic theory [9, 10]. A parametric mathematical model was proposed based on the bridge model to describe the polishing effect and efficiency of various polishing processes [11, 12]. Shu pointed out that Kim’s model gave a flat uniform slip factor (SF), by ignoring the time-varying characteristics
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