Abstract
It is shown that, to a good approximation, over the range of energies (single scattering albedo, ω ⪅ 0.5) and angles (take-off angle >30°) used in angle-resolved AES and XPS spectroscopy, the depth distribution function (DDF) is approximately exponential with decay length Λ = λ i(1 + λ i/λ tr) − 1 2 , for inelastic mean free path (IMFP) λ i, and transport mean free path λ tr. As Λ is also the length measured for the attenuation length experimentally (with either the overlayer technique or from backscatter spectra, equivalent to λ i, using an interpretation which neglects elastic effects), the CDP may be obtained by straightforward Laplace inversion using experimentally determined attenuation lengths. That is, the correct composition depth profile may be obtained from systematically ignoring elastic scattering.
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