Abstract
In this paper, we introduce an anti-adhesion poly(dimethylsiloxane) (PDMS)-coatedflexible mold and its applications for room-temperature imprint lithography. The flexiblemold is fabricated using an ultraviolet-curable prepolymer on a flexible substrate, and itssurface is passivated with a thin layer of PDMS to impart an anti-adhesion property. Thehighly flexible mold enables conformal contact with a substrate on which a low-viscositypolymer resist is spin-cast in a thin layer. Large-area imprinting is then realized at roomtemperature under significantly reduced pressure. The mold was durable even afterrepetitive imprinting of over 200 times. Also, we show a double imprinting on the substratewith a PDMS-coated replica polymeric mold having 500 nm line patterns. This enablesthe formation of matrix patterns with varying feature heights in less than 7 min.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
