Abstract
In this paper, we introduce an anti-adhesion poly(dimethylsiloxane) (PDMS)-coatedflexible mold and its applications for room-temperature imprint lithography. The flexiblemold is fabricated using an ultraviolet-curable prepolymer on a flexible substrate, and itssurface is passivated with a thin layer of PDMS to impart an anti-adhesion property. Thehighly flexible mold enables conformal contact with a substrate on which a low-viscositypolymer resist is spin-cast in a thin layer. Large-area imprinting is then realized at roomtemperature under significantly reduced pressure. The mold was durable even afterrepetitive imprinting of over 200 times. Also, we show a double imprinting on the substratewith a PDMS-coated replica polymeric mold having 500 nm line patterns. This enablesthe formation of matrix patterns with varying feature heights in less than 7 min.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
