Abstract
Rapid thermal processing (RTP) techniques are often applied in microelectronic technology. The main characteristics of RTP techniques lie in single wafer treatments, fast thermal kinetics at low thermal cost and reduced contamination risks; moreover, many types of reaction can be realized with one single wafer treatment. Problems of measurement and control of space-time temperature profiles have not yet been solved in a satisfactory way; in particular, classical control algorithms (such as PID control) can give bad dynamics to the system if nominal temperature profiles must be modified. Modelling of the thermal behaviour of the process leads to very complex mathematical models. These are the reasons why adaptive control techniques are chosen. A CARIMA model is an interesting input-output model of the thermal processor, whose parameters can be estimated on-line, using an identification scheme which includes supervisory actions. The adaptive control algorithm is a full-state feedback pole-placement law with an adaptive observer. A partial-state reference model was included in the control law algorithm. This type of control law can be implemented even for non-minimum-phase systems, time-varying dynamics, a wrong assumption about the time delay of the system, and when disturbances on the load exist. Experimental results are presented which show a better performance when using an adaptive control strategy
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