Abstract
A planar vibratory gyroscope using electromagnetic force is proposed and tested. Such a gyroscope has the advantages of simple fabrication and large output characteristics compared with an electrostatic gyroscope. The fabricated gyroscope comprises a gyroscopic element with two gimbals, driving and sensing coils. The driving coils, which are under the outer gimbal, vibrate the gyroscopic element. Vibration of the inner gimbal due to an applied angular rate is detected by sensing coils underneath it. Maximum output is obtained when the output gimbal is driven at a resonance frequency of the inner gimbal. Measured sensitivities are from 4.2 to 26 mV (° s −1) −1. Sensitivities are measured at several exciting voltages and several values of the air gap of the sensing parts.
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