A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Haoran Wang,Huikai Xie,Zhenfang Chen,Yingtao Ding,Huabei Jiang,Yuanyuan Yu,Mengyuan Li

doi:10.1109/transducers.2019.8808528

A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Haoran Wang, Huikai Xie + Show 5 more

https://doi.org/10.1109/transducers.2019.8808528

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Publication Date: Jun 1, 2019

Citations: 18

Affiliation: University of Florida, Beijing Institute of Technology, University of South Florida

#Sound Pressure Level #Chemical Mechanical Polishing Techniques + Show 8 more

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Abstract

This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 µm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.

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