A piezo-driven micro-inclination stage for calibration of a micro-acceleration transducer: structure and control strategy

Abstract

In some space applications, such as space navigation and vibration control of the large space structures, micro-acceleration transducers are required and have to be calibrated accurately. Unfortunately, providing extremely small static and quasi-static stimuli (accelerations) for the calibration of the micro-acceleration transducer has been a challenging task. This paper proposes a novel piezo-driven micro-inclination stage (PMIS) that can produce both discrete and continuous tumbles in a gravity field so that extremely small static and quasi-static stimuli (accelerations) can be obtained from a tiny component of the gravity constant. The proposed PMIS, which is driven by the lead zirconate titanate (PZT) stack, employs a rhombic mechanism to provide the PZT stack with a proper preload for the purpose of outputting a bidirectional force. To produce accurate static and quasi-static stimuli, the hysteresis non-linearity inherent in PZT stack is compensated by employing the strain feedback based adaptive control where the hysteresis property is identified online using the controlled auto-regressive moving average model. Furthermore, to improve the resolution of strain feedback, the strain sensitivity is maximized through structure optimization of the rhombic mechanism. The experimental results demonstrated that the proposed PMIS can produce minimal micro-inclination of (corresponding to the induced micro-acceleration of ) with the frequency ranging from 0 (DC) to 2 Hz.