Abstract
A physics-based compact analytical expression for the thermal impedance of SOI MOSFET's is presented. This new model extends the steady-state thermal model of Goodson and Flik (1992) to allow for transient and ac analyses, while improving self-consistency for large devices. The modified steady-state model compares favorably to measurements. Using the software package Thermal Impedance Pre-Processor (TIPP), a multiple-pole circuit can be fitted to the thermal-impedance model. The new model is compared to three-dimensional (3-D) ANSYS transient simulations with good results. The thermal-equivalent circuit is used in conjunction with a modified version of SOISPICE to give efficient electrothermal simulations in the dc and transient regimes.
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