Abstract
A phasor-particle model for coupling between an automatching network and electrical plasma is developed. The external circuit consists of an automatching box and an ideal voltage source is described by phasor equations. The plasma is modeled by hybrid particle-in-cell ions and Boltzmann distribution of electrons. The chamber consisted of the radio frequency powered electrode and the grounded chamber wall is a good capacitor. The accumulated surface charges and the potential of the powered electrode are modified by the plasma in the proposed model. The amplitude and phase of the voltage/current of the external matching network are numerically simulated. The negative direct current bias voltage in an asymmetrical system is generated.
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