Abstract
Abstract Microcrystalline diamond films with an orientation evolution were initially deposited through periodic magnetic field assisted hot filament chemical vapor deposition system (PMF-HFCVD). The results indicated that lower angular frequency (ω f ) favored the (110) orientation while higher ω f facilitated the (100) orientation. We attributed this evolution to the effect of increasing collision possibility with increasing angular frequency of the magnetic field. In addition, the films with (110) orientation exhibited better electron field emission properties than that with (100) orientation.
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